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AssigneeFujitsu Limited
InventorsHiroshi Yasuda, Satoru Yamazaki, Kiichi Sakamoto
Estimating the term…
A pattern judging method which is to be implemented on a computer automatically determines whether or not a pattern should be prohibited from being formed in a mask. The pattern judging method includes the steps of (a) dividing an area of the mask where a desired pattern is to be formed into a plurality of regions, (b) calculating a predetermined physical quantity for each of the regions for a case where one or a plurality of openings corresponding to the desired pattern are formed in the mask, and (c) prohibiting the desired pattern from being formed in the mask if the predetermined quantity calculated in the step (b) exceeds a threshold value for at least one of the regions.
A pattern judging method to be implemented on a computer for automatically determining whether or not a pattern should be formed in a mask, said pattern judging method comprising the steps of:
A mask producing method for producing a mask which is used for drawing patterns on an object by a charged particle beam transmitted through the patterns of the mask, said mask producing method comprising the steps of:
Dependencies are inferred from the claim text.