Solar-induced chemical vapor deposition of diamond-type carbon films
AssigneeMidwest Research Institute
InventorsJ. Roland Pitts, C. Edwin Tracy, David E. King, James T. Stanley
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AssigneeMidwest Research Institute
InventorsJ. Roland Pitts, C. Edwin Tracy, David E. King, James T. Stanley
Estimating the term…
An improved chemical vapor deposition method for depositing transparent continuous coatings of sp.sup.3 -bonded diamond-type carbon films, comprising: a) providing a volatile hydrocarbon gas/H.sub.2 reactant mixture in a cold wall vacuum/chemical vapor deposition chamber containing a suitable substrate for said films, at pressure of about 1 to 50 Torr; and b) directing a concentrated solar flux of from about 40 to about 60 watts/cm.sup.2 through said reactant mixture to produce substrate temperatures of about 750.degree. C. to about 950.degree. C. to activate deposition of the film on said substrate.
A chemical vapor deposition method for depositing transparent continuous coatings of sp.sup.3 -bonded diamond carbon film, comprising:
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