Device and method for scrubbing and cleaning substrate

A scrubbing and cleaning device comprising:

• means having an upper and a lower brush members for scrubbing both surfaces of a substrate, respectively;
• means for rotating the upper and lower brush members, respectively;
• means for supplying cleaning solution to the upper and lower brush members, respectively;
• means having upper rollers each being arranged between the upper brush members and also having lower rollers each being arranged between the lower brush members and serving to carry the substrate between the upper and the lower brush members by the upper and lower rollers;
• lift holder means for receiving the substrate from the carrying means to hold and lift the substrate;
• and
• stage means for receiving the substrate from the lift holder means and for rotating the substrate thereon while applying a rinsing solution to the substrate.