US 5,345,534 A · Semiconductor wafer heater with infrared lamp module with light blocking means

Abstract

A thin reflective cylindrical baffle [20] in a radiant lamp heater is provided in the space below a plurality of heating bulbs [2,4,6] (arranged in a center position and around a middle and outer ring) and above a quartz window [12]. The baffle diameter is such that it fits within the annular space between the middle [4] and outer [6]ring of bulbs. The baffle which blocks a predetermined amount of light generated by the lamp bulbs [20] allows improved controllability of wafer temperature profile--for a wafer heated by a radiant lamp heater.

Claims10

Dependent claims

A semiconductor wafer lamp heater comprising:

a source of light which includes a plurality of light bulbs, said bulbs being positioned so as to lie in and define substantially concentric first and second cylinders;
and
a cylindrical baffle, said cylindrical baffle lying in and defining a third cylinder substantially concentric with said first and second cylinders, said third cylinder including a radius less than said first cylinder and greater than said second cylinder.

Dependencies are inferred from the claim text.

Semiconductor wafer heater with infrared lamp module with light blocking means

Life of this patent

Semiconductor wafer heater with infrared lamp module with light blocking means

Life of this patent

Abstract

Claims10