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US 5,344,742 AGranted
Benzyl-substituted photoactive compounds and photoresist compositions comprising same
AssigneeShipley Company, L.L.C.
InventorsRoger F. Sinta, George Barclay, Martha M. Rajaratnam
Life of this patent
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Abstract
The present invention comprises certain benzyl-substituted photoactive compounds and photoresist compositions comprising such photoactive compounds. The benzyl-substituted photoactive compounds of the invention are particularly suitable as the photoactive component in chemically amplified positive-acting and negative-acting compositions.
Claims28
A photoresist comprising a resin binder and at least one photoactive compound of the following formula:
- ##STR5## wherein R is selected from the group consisting of substituted and unsubstituted alkyl, substituted and unsubstituted alkoxy, substituted and unsubstituted aralkyl, and substituted and unsubstituted aryl;
- R.sup.1 and R.sup.2 are each independently selected from the group consisting of hydrogen, halo, cyano, substituted and unsubstituted alkyl, substituted and unsubstituted alkoxy, substituted and unsubstituted alkenyl, substituted and unsubstituted alkynyl, substituted and unsubstituted aralkyl and substituted and unsubstituted aryl;
- each R.sup.4, R.sup.5, R.sup.6, R.sup.7 and R.sup.8 is independently selected from the group consisting of hydrogen, halo, hydroxy, cyano, alkanoyl, carboxyl, sulfonyl, substituted and unsubstituted alkyl, substituted and unsubstituted alkenyl, substituted and unsubstituted alkynyl, substituted and unsubstituted aralkyl and substituted and unsubstituted aryl, wherein at least one of R.sup.4, R.sup.5, R.sup.6, R.sup.7 and R.sup.8 is other than hydrogen.
A photoresist composition comprising a resin binder and one or more photoactive compounds of of the following formula I:
- ##STR6## wherein R is selected from the group consisting of substituted and unsubstituted alkyl, substituted and unsubstituted alkoxy, substituted and unsubstituted aralkyl, and substituted and unsubstituted aryl;
- R.sup.1 and R.sup.2 are each independently selected from the group consisting of hydrogen, halo, cyano, substituted and unsubstituted alkyl, substituted and unsubstituted alkoxy, substituted and unsubstituted alkenyl, substituted and unsubstituted alkynyl, substituted and unsubstituted aralkyl, and substituted and unsubstituted aryl;
- each R.sup.3 phenol ring substituent is independently selected from the group consisting of hydrogen, halo, hydroxy, cyano, alkanoyl, carboxyl, sulfonyl, substituted and unsubstituted alkyl, substituted and unsubstituted alkenyl, substituted and unsubstituted aryl, and substituted and unsubstituted aralkyl;
- and n is an integer of from 1 to 6.
1 more element
A photoresist composition comprising a resin binder and one or more photoactive compounds of of the following formula II:
- ##STR8## wherein R is selected from the group consisting of substituted and unsubstituted alkyl, substituted and unsubstituted alkoxy, substituted and unsubstituted aralkyl, and substituted and unsubstituted aryl;
- R.sup.1 and R.sup.2 are each independently selected from the group consisting of hydrogen, halo, cyano, substituted and unsubstituted alkyl, substituted and unsubstituted alkoxy, substituted and unsubstituted alkenyl, substituted and unsubstituted alkynyl, substituted and unsubstituted aralkyl and substituted and unsubstituted aryl;
- each R.sup.3 phenyl ring substituent is independently selected from the group consisting of hydrogen, halo hydroxy, cyano, alkanoyl, carboxyl, sulfonyl, substituted and unsubstituted alkyl, substituted and unsubstituted alkenyl, substituted and unsubstituted aryl, and substituted and unsubstituted aralkyl;
- n is an integer of from 1 to 5;
- and m is an integer of from 2 to 6.
2 more elements
A photoresist comprising a resin binder and at least one photoactive compound of the following formula:
- ##STR9## wherein R is selected from the group consisting of substituted and unsubstituted alkyl, substituted and unsubstituted alkoxy, substituted and unsubstituted aralkyl, and substituted and unsubstituted aryl;
- R.sup.1 and R.sup.2 are each independently selected from the group consisting of hydrogen, halo, cyano, substituted and unsubstituted alkyl, substituted and unsubstituted alkoxy, substituted and unsubstituted alkenyl, substituted and unsubstituted alkynyl, and substituted and unsubstituted aryl;
- each R.sup.4, R.sup.5, R.sup.6, R.sup.7 and R.sup.8 is independently selected from the group consisting of hydrogen, an electron-withdrawing group, substituted and unsubstituted alkyl, substituted and unsubstituted alkenyl, substituted and unsubstituted alkynyl, substituted and unsubstituted aralkyl and substituted and unsubstituted aryl.
A photoresist comprising a resin binder and at least one photoactive compound of the following formula:
- ##STR10## wherein R is selected from the group consisting of substituted and unsubstituted alkyl, substituted and unsubstituted alkoxy, substituted and unsubstituted aralkyl, and substituted and unsubstituted aryl;
- R.sup.1 and R.sup.2 are each independently selected from the group consisting of hydrogen, halo, cyano, substituted and unsubstituted alkyl, substituted and unsubstituted alkoxy, substituted and unsubstituted alkenyl, substituted and unsubstituted alkynyl, substituted and unsubstituted aralkyl and substituted and unsubstituted aryl;
- each R.sup.4, R.sup.5, R.sup.6, R.sup.7 and R.sup.8 is independently selected from the group consisting of hydrogen, an electron-withdrawing group, substituted and unsubstituted alkyl, substituted and unsubstituted alkenyl, substituted and unsubstituted alkynyl, substituted and unsubstituted aralkyl and substituted and unsubstituted aryl, wherein at least one of R.sup.4, R.sup.5, R.sup.6, R.sup.7 and R.sup.8 is other than hydrogen.
Dependencies are inferred from the claim text.