A semiconductor device comprising a polysilicon layer having first, second, and third regions, the second region being disposed between the first and third regions, the semiconductor device further comprising diffusion barrier regions of a predetermined width between the first and second regions and between the second and third regions, the second region being provided with a first impurity of a first conductivity type to a first concentration, the diffusion barrier regions being provided with a second impurity to a second concentration, and the first and third regions being provided with a third impurity of a second conductivity type opposite the first conductivity type, the first and third regions being provided to a third concentration greater than the first concentration.