Surface modification of organic materials to improve adhesion
AssigneeInternational Business Machines Corporation
InventorsCarol R. Jones, Robin A. Susko
Life of this patent
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Abstract
A silicon modified organic surface is roughened by treatment with an oxygen containing plasma. If necessary the organic surface may be silicon-modified by treatment with a silicon containing material prior to plasma treatment. The roughened organic surface provides improved adhesion to other organic surfaces and to deposited metals. Improvements in methods for laminating organic surfaces and for depositing metals on organic surfaces which achieve improved adhesion are disclosed. Structures comprising laminated organic layers or metal deposited on organic surfaces which provide improved adhesion between the organic layers or between the metal and the organic-surface are also disclosed.
Claims14
In the method for coating a silicon-modified organic surface with metal comprising electrolessly depositing a layer of metal on said organic surface from a metal containing bath, the improvement comprising, prior to electroless deposition of the metal, subjecting the silicon-modified surface to an oxygen containing plasma, whereby adhesion between the silicon-modified surface and the electrolessly deposited metal is improved.
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition,
- a. treating said organic surface with a liquid silicone containing material, and
- b. subjecting the treated surface to an oxygen containing plasma,
- whereby adhesion between said organic surface and the deposited metal is improved.
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition,
- a. treating said organic surface with a hexamethyl disilane liquid, and
- b. subjecting the treated surface to an oxygen containing plasma,
- whereby adhesion between said organic surface and the deposited metal is improved.
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition,
- a. treating said organic surface with a silicon containing material, and
- b. subjecting the treated surface to plasma containing a fluorine entity and oxygen, wherein said fluorine containing entity is chosen from the group consisting of CF.sub.4, C.sub.2 F.sub.6, CF.sub.3 CL, SF.sub.6, CCL.sub.2 F.sub.2, and NF.sub.3, and said plasma contains from about 2 to about 70 mole percent of said fluorine containing entity,
- whereby adhesion between said organic surface and the deposited metal is improved.
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition,
- a. treating said organic surface with a silicon containing material, and
- b. subjecting the treated surface to a plasma containing oxygen and about 30 mole percent CF.sub.4,
- whereby adhesion between said organic surface and the deposited metal is improved.
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition,
- a. treating said organic surface with a silicon containing material,
- b. subjecting the treated surface to an oxygen containing plasma, and
- c. thereafter subjecting said surface to a predominantly fluorine containing plasma to substantially remove silicon containing molecules from said surface,
- whereby adhesion between said organic surface and the deposited metal is improved.
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition,
- a. treating said organic surface wit a silicon containing material,
- b. subjecting the treated surface to an oxygen containing plasma, and
- c. thereafter subjecting said surface to a plasma containing about 70 mole percent CF.sub.4 to substantially remove silicon containing molecules from said surface,
- whereby adhesion between said organic surface and the deposited metal is improved.
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition,
- a. treating said organic surface with a hexamethyl disilane liquid, and
- b. subjecting the treated surface to a plasma containing oxygen and about 30 mole percent CF.sub.4,
- whereby adhesion between said organic surface and the deposited metal is improved.
Dependencies are inferred from the claim text.