Apparatus and method for substrate heating utilizing various infrared means to achieve uniform intensity
AssigneeApplied Materials, Inc.
InventorsRoger N. Anderson, Thomas E. Deacon, David K. Carlson
Life of this patent
Estimating the term…
Abstract
A reflector array employs a number of linear, tubular heater lamps arranged in a circle concentric with the substrate to be heated. Some of the lamps have focusing reflectors and the remainder have dispersive reflectors. A peripheral cylindrical reflector surrounds the lamps and their associated reflectors. The combined reflectors permit balancing the thermal radiation intensity across the surface of the substrate.
Claims5
A heater apparatus for directing thermal radiation along an axis of cylindrical symmetry for the apparatus to thermally irradiate a workpiece supported on a susceptor substantially normal to the axis, the heater apparatus comprising:
- a radial array of circumferentially spaced, radially extending elongated heaters lying in a common plane substantially normal to the axis of cylindrical symmetry;
- a plurality of focusing reflectors for focusing radiation on the workpiece from a first group of heaters in the radial array primarily along paths substantially parallel to the axis;
- a plurality of dispersive reflectors for reflecting and dispersing radiation toward the workpiece from a second group of heaters interspersed between heaters in the first group of heaters in the radial array;
- and
- a cylindrical reflector substantially coaxial with the axis of cylindrical symmetry and located between the radial array of heaters and the workpiece for reflecting to and across the workpiece radiation from the dispersive reflectors.
In a chemical vapor deposition apparatus, a method of directing thermal radiation to a planar disk-shaped substrate supported on a susceptor substantially normal to an axis of radiation passing through a center of the substrate comprising:
- in a plane substantially normal to the axis of radiation generating radiation form an array of separated radially extending heaters;
- focusing radiation from ones of the heaters to the substrate primarily along paths substantially parallel to the axis;
- dispersing radiation toward the substrate from others of the heaters;
- and
- collecting dispersed radiation with a cylindrical reflector substantially coaxial with the axis of radiation and reflecting the collected radiation toward an outer edge of and across an extent of the substrate between the center and the edge of the substrate.
Dependencies are inferred from the claim text.