Scanning tunneling microscope
AssigneeJEOL Ltd.
InventorHideo Kobayashi
Life of this patent
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Abstract
A scanning tunneling microscope using a tip which can be easily replaced. The microscope includes a piezoelectric drive mechanism for driving the tip, a tip holder to which the tip is attached, and a sample holder. The tip holder can be detachably mounted to the piezoelectric drive mechanism. The Z-axis of a coordinate system extends through the tip holder and across the sample surface during observation. A replacement rod for replacng the tip holder is mounted so as to be movable along the Z-axis.
Claims5
A scanning tunneling microscope comprising:
- a tip holder having a tip;
- a piezoelectric drive mechanism which drives the tip and to which the tip holder is detachably mounted;
- means for holding a sample;
- a replacement rod for replacing the tip holder, the replacement rod being mounted so as to be moving along the Z-axis of a coordinate system, the Z-axis extending through the tip holder and across the surface of the sample during observation;
- and
- means for moving the sample away from the Z-axis during the replacement.
A scanning tunneling microscope comprising:
- a tip holder having a tip;
- a piezoelectric drive mechanism which drives the tip and to which the tip holder is detachably mounted;
- a sample holder holding a sample;
- and
- a sample stage upon which the sample holder is mounted;
- and
- a replacement rod having a chuck for gripping the sample holder or the tip holder, the replacement rod being mounted so as to be moving along the Z-axis of a coordinate system, the Z-axis extending through the sample holder and across the surface of the sample during observation.
A scanning tunnelling microscope comprising:
- a tip drive mechanism for driving a tip mounted detachably;
- an observation chamber accommodating the drive mechanism;
- a transfer chamber connected with the observation chamber via a first partition valve;
- a preliminary chamber connected with the transfer chamber via a second partition valve;
- an insertion rod for inserting a new tip into the transfer chamber via both preliminary chamber and the second partition valve;
- a moving member which carry new tips introduced by the insertion rod and is moved inside the transfer chamber between a first position where the new tips are installed upon the moving member and a second position where the new tips are inserted into the observation chamber;
- and
- a replacement rod which, when the moving member is in the second position, receives a new tip from the moving member and carries the tip into the observation chamber via the second partition valve.
A scanning tunneling microscope comprising:
- a tip holder having a tip;
- a sample stage holding a sample in such a way that the tip is spaced from the sample surface along the Z-axis of a coordinate system;
- a piezoelectric drive mechanism driving the tip and to which the tip holder is detachably mounted;
- a base upon which the sample stage and the piezoelectric drive mechanism are disposed;
- and
- a mechanical means for moving the drive mechanism along Z-axis between a first position at which the mechanism for cleaning the sample surface is close to the sample upon the base and a second position at which the mechanism is distant from the sample.
Dependencies are inferred from the claim text.