Remover solution for photoresist
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTsuyoshi Miyashita, Shigeru Ohtawa, Hiroyuki Tohda, Shozo Toda, Hisashi Nakane
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Abstract
A remover solution for photoresist comprising (a) a solvent which is typically water, (b) an inorganic or organic alkaline compound such as sodium and potassium hydroxides, and (c) a borohydride compound such as sodium and lithium borohydrides and organic amine borane compounds. When used for removing patterned photoresist layer in the manufacturing process of, for example, electronic circuit board substrates. The method gives quite satisfactory results without discoloration or denaturation of the copper surface and solder surface, consequently leading to the production of high-quality products.
Claims10
A method for removing a patterned photoresist film provided on a substrate for a printed circuit during the manufacture of said printed circuit, consisting essentially of the step of immersing said substrate provided with patterned photoresist film in a remover solution for a time period sufficiently long and at a temperature sufficiently high for removing said patterned photoresist film from said substrate, wherein said photoresist is one which is developable by a weakly alkaline developer solution, said immersion step for removing the patterned photoresist film is carried out when the patterned photoresist film is no longer needed during the manufacture of said printed circuit, and said remover solution comprises:
- (a) a solvent;
- (b) an alkaline compound dissolved in said solvent;
- and
- (c) a borohydride compound dissolved in said solvent,
- wherein the concentration of said alkaline compound dissolved in the solvent is in the range from 0.1 to 10% by weight, and the amount of said borohydride compound dissolved in the solvent is in the range from 0.01 to 50 moles per mole of the alkaline compound dissolved in the solvent.
Dependencies are inferred from the claim text.