Integrated circuit high voltage protection

As part of an integrated circuit chip formed on a semiconductor substrate, having a wire connection pad and an active circuit to be protected from high voltage spikes introduced through said pad, a protection circuit located on said chip and disposed in an electrical current path therebetween, comprising:

• a first effect transistor having a gate connected to said current path, and source and drain connections disposed between said current path and a first common point of the active circuit, said gate separated by an insulative layer a distance from said substrate such that the gate insulation remains effective during said high voltage spikes, whereby the existance of a high voltage spike causes the first transistor to turn on with a low impedance path between said current path and said first common point and thus limit the voltage in said current path,
• a first resistance provided in said current path between said pad and said first field effect transistor, said gate of said first transistor being connected on the pad side of said first resistance,
• a punch through semiconductor device connected between said current path intermediate of said first resistance and said first common point, thereby to provide a second low impedance path between said current path and said first common point for high voltage spikes, and
• a second field effect transistor having a gate connected to said current path at an intermediate location between the first transistor and the active circuit, and source and drain connections disposed between said current path at said intermediate location and a second common point of the active circuit, said gate being separated by an insulative layer a distance from said substrate such that the gate insulation would irreversibly break down during said high voltage spikes but is protected therefrom by said first field effect transistor.