Liquid phase epitaxial growth of garnet films
AssigneeBell Telephone Laboratories, Incorporated
InventorsGeorge W. Berkstresser, Stuart L. Blank
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AssigneeBell Telephone Laboratories, Incorporated
InventorsGeorge W. Berkstresser, Stuart L. Blank
Estimating the term…
The manufacture of magnetic bubble devices typically involves a step of epitaxially depositing a layer of a garnet material on a substrate having suitable lattice parameters, e.g., layers of certain rare earth-iron garnets are conveniently deposited on a gallium-gadolinium garnet substrate. Deposition by liquid epitaxy has been preferred and, in particular, deposition from a melt comprising garnet materials in a PbO--B.sub.2 O.sub.3 flux. According to the invention, garnet layers are epitaxially grown from a melt comprising a PbO--V.sub.2 O.sub.5 flux. Growth from such melt has desirably slow kinetics, resulting in slow deposition as is beneficial especially for the growth of layers on an assembly of substrates. Additional benefits are ease of removal of liquid droplets remaining on a grown film upon removal from the melt, both by spinning and by rinsing.
Method for making a magnetic bubble device comprising a layer of a garnet material which is epitaxially deposited on a surface of a supporting substrate, said method comprising
Dependencies are inferred from the claim text.