Boat for the epitaxial growth of several layers from the liquid phase
AssigneeU.S. Philips Corporation
InventorsMarc Mahieu, Jacques Varon, Philippe Vandenberg
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Abstract
A boat for the epitaxial growth of several layers on a substrate includes reservoirs present over a slide in the boat, as well as substrates on a base plate in the boat. A fixedly arranged plate is placed between the base plate and the slide, which fixedly arranged plate and slide include communication windows for liquid solutions in the reservoirs to act on the substrates. Applications of this invention are epitaxial growth of several layers in general, and in particular, the manufacture of plates for opto-electronic semiconnector devices.
Claims8
A boat for epitaxial growth from the liquid phase of successive semiconductor layers on at least one semiconductor substrate, said boat comprising
- a fixed base plate having a recessed surface for supporting at least one substrate,
- a flat slide provided above said fixed base plate, said slide being movable through a wall of the boat over said base plate,
- at least one reservoir containing liquid solution for epitaxial growth and being fixed at one end of said boat, said slide supporting said liquid solution in said reservoir, and
- a fixed flat plate placed between said base plate and said slide, said flat plate having at least one window through its surface,
- said slide having a plurality of communication windows through its surface for respectively admitting said liquid solution to said substrate and discharging said liquid solution from said substrate.
Dependencies are inferred from the claim text.