Tiltable support bracket for slidably supporting quartz support tubes for semiconductor wafer processing boards, and processing apparatus embodying such brackets

A support bracket for slidably supporting support rails carrying semiconductor wafer boats into and out of a processing furnace, comprising:

• two spaced apart pillars;
• a rotatable shaft extending between the top ends of said pillars;
• a first member attached to and connecting bottom ends of said pillars;
• a second member hingedly connected to said first member for hinging of said first member about a hinge axis parallel to the rotational axis of said rotatable shaft;
• said second member adapted for attachment to a base surface of a processing apparatus;
• at least one projection extending from said first member on a side of said hinge axis remote from said second member;
• the arrangement such that on sliding of said support rails into said furnace, contact between a member connected to said rails and said pillars hinges said pillars about said hinge axis to a substantially horizontal position, and on sliding of said support rails out of said furnace, contact between said member connected to said rails and said projection hinges said pillars about said hinge axis to an upright position.

A semiconductor processing apparatus including a furnace tube, an enclosure for said tube and a base extending relative to said housing;

• at least one support bracket mounted on said base;
• an end plate for closing said furnace tube;
• means for moving said end plate towards said furnace tube for closing said tube, and for moving said end plate away from said tube;
• and means connected to said end plate for attaching to support rails, whereby movement of said end plate towards said furnace tube pushes said support rails into said furnace tube;
• said support bracket comprising;
• two spaced apart pillars;
• a rotatable shaft extending between the top ends of said pillars for support of said support rails;
• a first member attached to and connecting bottom ends of said pillars;
• a second member hingedly connected to said first member for hinging of said second member about a hinge axis parallel to the rotational axis of said rotatable shaft;
• said second member attached to said base;
• at least one projection extending from said first member in a direction away from said hinge axis;
• said projection extending up from said first member to a height less than the lower edge of said end plate;
• the arrangement such that on movement of said end plate towards said furnace tube said support rails are initially at least partly supported on said shaft, continued movement of said end plate causes contact between said end plate and said pillars, said pillars being hinged over to permit passage of said end plate, reverse movement of said end plate producing contact between said end plate and said projection to hinge said pillars up to a support position.