Aqueous developable poly(olefin sulfone) terpolymers
AssigneeRCA Corporation
InventorThomas R. Pampalone
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Abstract
This invention relates to novel terpolymers of 3-methylcyclopentene, 2-cyclopentene-1-acetic acid and sulfur dioxide. Positive electron beam resist media prepared from the subject terpolymers possesses excellent sensitivity and development latitude and unexpectedly are developable with conventional aqueous alkaline developers.
Claims7
A positive electron beam resist terpolymer comprising a monomer component and sulfur in a 1:1 molar ratio, said monomer component being comprised of from about 70 mole percent to about 93 mole percent of 3-methylcyclopentene and from about 7 mole percent to about 30 mole percent of 2-cyclopentene-1-acetic acid.
Dependencies are inferred from the claim text.