Fluorination of ancillary ligands of group (iii) precursors and their applications in vapor depositions

A composition for deposition of a film comprising a Group (III)-containing precursor, the Group (III)-containing precursor being of the formulae:

• wherein M is Al, Ga, or In;
• R1, R2, R3 and R4 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons and at least one of R1 though R4 is a fluorine or fluorocarbon;
• wherein n=1-3 forming 4- to 6-membered chelates;
• provided that if n is greater than or equal to 2, R3 and R4 substituents of additional carbon units do not have to be identical and may be independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein M is Al, Ga, or In;
• R2 and R3 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• R1 is not hydrogen but independently selected from linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• and at least one of R1 though R3 is a fluorine or fluorocarbon;
• wherein n=1-3 forming 4- to 6-membered chelates;
• provided that if n is greater than or equal to 2, R2 and R3 substituents of additional carbon units do not have to be identical and may also be independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein M is Al, Ga, or In;
• R2, R3, R4, R5, R6, and R7 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• R1 is not hydrogen but independently selected from linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• and at least one of R1 though R7 is a fluorine or fluorocarbon;
• wherein n1 and n2=1-3 forming 4- to 6-membered chelates and n1 and n2 do not have to be equal;
• provided that if n1 and n2 is greater than or equal to 2, R2, R3, R6, and R7 substituents of additional carbon units do not have to be identical and may also be independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein M is Al, Ga, or In;
• R2, R3, R4, R5, R6, and R7 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• R1 is not hydrogen but independently selected from linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• and at least one of R1 though R7 is a fluorine or fluorocarbon;
• wherein n1 and n2=1-3 forming 4- to 6-membered chelates and n1 and n2 do not have to be equal;
• provided that if n1 and n2 is greater than or equal to 2, R2, R3, R6, and R7 substituents of additional carbon units do not have to be identical and may also be independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein M is Al, Ga, or In;
• R2 and R3 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• R1 is not hydrogen but independently selected from linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein n=1-3 forming 4- to 6-membered chelates;
• provided that if n is greater than or equal to 2, R2 and R3 substituents of additional carbon units do not have to be identical and may also be independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein X═OR4 or NR5R6 and R4 is not hydrogen but independently selected from linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• R5 and R6 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• and at least one of R1 though R6 is a fluorine or fluorocarbon;
• wherein M is Al, Ga, or In;
• R1, R2, R3 and R4 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein n=1-3 forming 4- to 6-membered chelates;
• provided that if n is greater than or equal to 2, R3 and R4 substituents of additional carbon units do not have to be identical and may also be independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein X═OR5 or NR6R7 and R5 is not hydrogen but independently selected from linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• R6 and R7 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• at least one of R1 though R7 is a fluorine or fluorocarbon;
• wherein M is Al, Ga, or In;
• R2 and R3 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• R1 is not hydrogen but independently selected from linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein n=1-3 forms 4- to 6-membered chelates;
• provided that if n is greater than or equal to 2, R2 and R3 substituents of additional carbon units do not have to be identical and may also be independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein X═OR4 or NR5R6 and R4 is not hydrogen but independently selected from linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• R5 and R6 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• at least one of R1 though R6 is a fluorine or fluorocarbon;
• wherein M is Al, Ga, or In;
• R1, R2, R3, and R4 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein n=1-3 forms 4- to 6-membered chelates;
• provided that if n is greater than or equal to 2, R3 and R4 substituents of additional carbon units do not have to be identical and may also be independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein X═OR5 or NR6R7 and R5 is not hydrogen but independently selected from linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• R6 and R7 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• at least one of R1 though R7 is a fluorine or fluorocarbon;
• wherein M is Al, Ga, or In;
• R2, R3, R4, R5 and R6 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• R1 is not hydrogen but independently selected from linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein n=1-3 forming 4- to 6-membered chelates;
• provided that if n is greater than or equal to 2, R2 and R3 substituents of additional carbon units do not have to be identical and may also be independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein X═OR7 or NR8R9;
• R7 is not hydrogen but independently selected from linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• R8 and R9 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• at least one of R1 though R9 is a fluorine or fluorocarbon;
• wherein M is Al, Ga, or In;
• R1, R2, R3, R4, R5, R6 and R7 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein n=1-3 forming 4- to 6-membered chelates;
• provided that if n is greater than or equal to 2, R3 and R4 substituents of additional carbon units do not have to be identical and may also be independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• wherein X═OR8 or NR9R10;
• R8 is not hydrogen but independently selected from linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• R9 and R10 are independently selected from hydrogen, fluorine, linear, branched or cyclic alkyl groups, fluorocarbons, or aryl groups with between 1 and 12 carbons;
• at least one of R1 though R10 is a fluorine or fluorocarbon.