Cooling apparatus, substrate processing apparatus and a method for cooling a processing liquid

Abstract

A cooling apparatus according to the present invention includes a heat exchanger which cools the processing liquid through heat exchange with a cooling medium, a mixing part which mixes the processing liquid output from the heat exchanger and the processing liquid not having passed through the heat exchanger, a temperature detector which detects the temperature of the processing liquid resulting from the mixing, and a controller which controls the temperature of the processing liquid to be output from the mixing part by regulating a mixing ratio of the processing liquid at the mixing part on a basis of detection result from the temperature detector.

Dependencies are inferred from the claim text.