Memory device and method of forming the same
AssigneeWinbond Electronics Corp.
InventorsChien-Ming Lu, Tzu-Ming Ou Yang
Life of this patent
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Abstract
Provided is a memory device including a substrate, a plurality of bit-line structures, a plurality of conductive plugs, and a plurality of conductive pads. The substrate has a plurality of active areas. The plurality of bit-line structures are disposed on the substrate in parallel. The plurality of conductive plugs are respectively disposed aside the plurality of bit-line structures, and are electrically connected to the plurality of active areas. The plurality of conductive pads are vertically disposed between the plurality of conductive plugs and the plurality of active areas. One of the conductive plugs has a bottom area falls within a range of a top area of a corresponding conductive pad.
Claims12
A method of forming a memory device, comprising:
- forming a plurality of bit-line structures on a substrate in parallel, wherein the plurality of bit-line structures extend along a first direction;
- respectively forming a plurality of conductive lines between the plurality of bit-line structures to contact a plurality of active areas in the substrate;
- forming a sacrificial layer on the plurality of conductive lines;
- patterning the plurality of bit-line structures, the sacrificial layer, and the plurality of conductive lines to form a plurality of openings arranged along a second direction, wherein the plurality of openings at least cut off the plurality of conductive lines to form a plurality of conductive pads;
- forming a dielectric layer in the plurality of openings;
- removing the sacrificial layer to expose the plurality of conductive pads;
- and
- respectively forming a plurality of conductive plugs on the plurality of conductive pads, aside the plurality of bit-line structures, and electrically connected to the plurality of active areas,
- wherein the plurality of conductive pads are vertically disposed between the plurality of conductive plugs and the plurality of active areas and embedded in the substrate, wherein a perimeter of one of the plurality of conductive plugs falls entirely within a perimeter of a corresponding conductive pad in a top view, and a top surface of the plurality of conductive pads is level with a top surface of the plurality of active areas.
Dependencies are inferred from the claim text.