Information processing apparatus, information processing method, lithographic apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorKENTA KITA
Life of this patent
Estimating the term…
Abstract
An information processing apparatus comprises at least one processor and a memory coupled to the at least one processor. The memory stores instructions that, when executed by the at least one processor, cause the at least one processor to acquire processing results of a processing apparatus and generate a screen for selecting a first group and a second group used for judging an abnormality of the processing results on the basis of the acquired processing results together with a screen for displaying the processing results for each of a plurality of processing conditions.
Claims15
An information processing apparatus managing a processing apparatus that is a management target, the information processing apparatus comprising:
- at least one processor;
- and
- a memory coupled to the at least one processor, the memory storing instructions that, when executed by the at least one processor, cause the at least one processor to:
- acquire processing results of the processing apparatus;
- and
- generate a screen for selecting a first group and a second group used for judging an abnormality of the processing results on the basis of the acquired processing results together with a screen for displaying the processing results for each of a plurality of processing conditions.
An information processing apparatus managing a processing apparatus that is a management target, the information processing apparatus comprising:
- at least one processor;
- and
- a memory coupled to the at least one processor, the memory storing instructions that, when executed by the at least one processor, cause the at least one processor to:
- acquire processing results of the processing apparatus;
- output information for displaying the processing results for each of the plurality of processing conditions on the basis of the acquired processing results;
- input a first group and a second group selected for judging an abnormality of the processing results;
- and
- define thresholds for judging the abnormality on the basis of the first group and the second group that have been input and specify the abnormality in the processing results on the basis of the thresholds.
An information processing method executed by an information processing apparatus managing a processing apparatus that is a management target, the information processing method comprising:
- acquiring processing results of the processing apparatus;
- and
- generating a screen for selecting a first group and a second group used for judging an abnormality of the processing results on the basis of the acquired processing results together with a screen for displaying the processing results for each of a plurality of processing conditions.
Dependencies are inferred from the claim text.