Reaction furnace for producing polycrystalline silicon rod, gas supply nozzle, production method of polycrystalline silicon rod, and polycrystalline silicon rod

Abstract

A reaction furnace for producing a polycrystalline silicon rod, the interior of which is hermetically sealed by a bell jar and a bottom plate, wherein the bottom plate is provided with a plurality of electrode pairs for holding a silicon core wire and energizing the silicon core wire, and the bottom plate is further provided with a plurality of gas supply nozzles, each with a tip jet upward, for supplying a starting material gas for silicon deposition into the interior space of the bell jar, characterized in that at least a part of the surface of the gas supply nozzles in contact with the interior space of the bell jar is composed of quartz including a roughened surface area having a ten point average roughness Rz of 1.0-5.0 μm.

Dependencies are inferred from the claim text.