Single crystal furnace, heat conduction tool, and crystal pulling control method for single crystal furnace

Abstract

Implementations of this application provide a single crystal furnace, a heat conduction tooling, and a crystal pulling temperature control method for the single crystal furnace. The single crystal furnace includes a furnace body and a heat transfer assembly. The furnace body is configured to grow a monocrystalline silicon rod. The heat transfer assembly is arranged in the furnace body in an axial direction of the furnace body. The heat transfer assembly includes a heat transfer member. The heat transfer member is configured to be in contact with the monocrystalline silicon rod and conduct heat from the monocrystalline silicon rod.

Dependencies are inferred from the claim text.