US 2026/0297738 A1 · SEALING SYSTEM FOR A REACTOR SYSTEM

Abstract

A reactor can comprise a reaction chamber volume enclosed within a reaction chamber; a susceptor configured to translate up and down within the reaction chamber; a reaction space above, and a lower chamber space below, the susceptor within the reaction chamber volume; and/or a sealing system causing the reaction space and the lower chamber space to be substantially fluidly separate. The sealing system can comprise a spacer plate surrounding the susceptor; and/or a seal device coupled to and/or engaged with the susceptor and the spacer plate, wherein the seal device comprises a base ring coupled to the susceptor and a spring coupled to the base ring. The spring can have a spring bias, facilitating creation of a substantial seal between the spacer plate and the susceptor, causing the reaction space and the lower chamber space to be substantially fluidly separate as the susceptor translates within the reaction chamber.

Claims20

Dependent claims

A reactor, comprising:

a reaction chamber volume enclosed within a reaction chamber;
a susceptor configured to translate up and down along an axis within the reaction chamber;
a reaction space above the susceptor within the reaction chamber volume;
a lower chamber space below the susceptor within the reaction chamber volume;
and
a sealing system causing the reaction space and the lower chamber space to be substantially fluidly separate, wherein the sealing system comprises:
a spacer plate surrounding the susceptor;
and
a seal device coupled to the susceptor and the spacer plate, wherein the seal device comprises a base ring coupled to the susceptor and a spring coupled to the base ring,
wherein the spring has a bias toward a compressed position or an extended position, such that the spring bias facilitates creation of a substantial seal between the spacer plate and the susceptor, causing the reaction space and the lower chamber space to be substantially fluidly separate as the susceptor moves up and down within the reaction chamber.

7 more elements

Dependencies are inferred from the claim text.

Sealing system for a reactor system

Life of this patent

Sealing system for a reactor system

Life of this patent

Abstract

Claims20