Light source apparatus

Abstract

Provided is a light source apparatus that can be kept compact. The light source apparatus according to the present disclosure includes: a target holding unit having a hold plane for holding a target member that generates plasma by being irradiated with excitation light; and a mirror opposing the plasma generated from the target member held on the hold plane and configured to reflect generated light generated from the plasma. The mirror has a missing part for passing an optical axis of the excitation light to be radiated onto the target member held on the hold plane or an extension line of the optical axis.

Dependencies are inferred from the claim text.