Semiconductor devices and fabrication methods thereof
AssigneeVanguard International Semiconductor Corporation
InventorsCheng-Ping Chang, Yung-Hsiang Chen, Chien-Hui Li, Chien-Hsun Wu
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Abstract
A semiconductor device includes a substrate, a thin film resistor, a lead structure, and a passivation layer. The thin film resistor is disposed above the substrate and has a first end and a second end. The lead structure is disposed above the substrate and includes a conductive layer stacked on an etch stop layer. The etch stop layer is in direct contact with and covers the first end and the second end of the thin film resistor. The passivation layer covers the thin film resistor and the lead structure.
Claims20
A semiconductor device, comprising:
- a substrate;
- a thin film resistor, disposed above the substrate, and having a first end and a second end;
- a lead structure, disposed above the substrate, and comprising an etch stop layer and a conductive layer stacked on the etch stop layer, wherein the etch stop layer is in direct contact with and covers the first end and the second end of the thin film resistor;
- and
- a passivation layer, covering the thin film resistor and the lead structure.
A method of fabricating a semiconductor device, comprising:
- depositing a thin film resistance material layer above a substrate;
- patterning the thin film resistance material layer to form a thin film resistor having a first end and a second end;
- depositing an etch stop material layer and a conductive material layer above the substrate in sequence to cover the thin film resistor;
- patterning the conductive material layer to form a conductive layer;
- patterning the etch stop material layer to form an etch stop layer, wherein the etch stop layer and the conductive layer constitute a lead structure, and the etch stop layer is in direct contact with and covers the first end and the second end of the thin film resistor;
- and
- forming a passivation layer to cover the thin film resistor and the lead structure.
Dependencies are inferred from the claim text.