Multi-chambered chemical solid precursor ampoule

A sublimation ampoule comprising:

• a sublimation container having an open end and a closed end, a sidewall, and a central longitudinal axis, the sublimation container comprising:
• an interior wall extending across the sidewall of the sublimation container;
• a radial wall radial wall concentric with the central longitudinal;
• a first chamber and a second chamber separated by the interior wall;
• and,
• a third chamber and a fourth chamber and are separated from the first chamber and second chamber by the radial wall, and adjacent to the sidewall of the sublimation container;
• and,
• a container lid having a top surface and a bottom surface defining a thickness, the bottom surface removably securable to the open end of the sublimation container forming a fluid seal, the container lid comprising:
• a lid inlet positioned on the top surface of the container lid having a fixed inlet flow rate, the lid inlet extending through the thickness;
• at least one chamber inlet positioned on the bottom surface of the container lid fluidly connected to the lid inlet, the chamber inlet in fluid communication with the first chamber;
• the chamber inlet having a cross-sectional area;
• a lid outlet positioned on the top surface of the container lid having a fixed outlet pressure, the lid outlet extending through the thickness and in fluid communication with the fourth chamber;
• and,
• a plurality of conduits having a conduit inlet and a conduit outlet positioned on the bottom surface, the conduit inlet and conduit outlet extending partially into the thickness, the conduit fluidly connecting the first chamber, the second chamber, the third chamber and the fourth chamber, each of the plurality of conduits having cross-sectional area.