Mems cooling system having engineered thermal and mechanical connections
OwnerVikram Mukundan, Suryaprakash Ganti +5inventors
InventorsVikram Mukundan, Suryaprakash Ganti, Ananth Saran Yalamarthy, Prathima Kapa, Yu Chang Huang, ChunPin Pan, Chia Jui Lin
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Abstract
A system including a vibrational air transfer device and a heat spreader is described. The vibrational air transfer device extends in space and defines a plane. The vibrational air transfer device is thermally and mechanically coupled to the heat spreader. The mechanical coupling allows the vibrational air transfer device to tilt with respect to the plane about at least one axis and damps translation of the vibrational air transfer device with respect to the heat spreader.
Claims20
A system, comprising:
- a vibrational air transfer device, the vibrational air transfer device extending in space and defining a plane;
- and
- a heat spreader, the vibrational air transfer device being thermally and mechanically coupled to the heat spreader, the mechanical coupling allowing the vibrational air transfer device to tilt with respect to the plane about at least one axis and damping translation of the vibrational air transfer device with respect to the heat spreader.
A system, comprising:
- a vibrational air transfer device, the vibrational air transfer device extending in space and defining a plane, the vibrational air transfer device including a plurality of chambers, each of the plurality of chambers having a cooling element therein;
- a heat spreader;
- a plurality of pedestals coupling the vibrational air transfer device to the heat spreader;
- and
- a plurality of mechanical supporting structures coupled with the plurality of pedestals and the heat spreader, the plurality of pedestals and the plurality of mechanical supporting structures allowing the vibrational air transfer device to tilt with respect to the plane about at least one axis and damping translation of the vibrational air transfer device with respect to the heat spreader, the cooling element vibrating around a cooling element axis parallel to the at least one axis.
A method, comprising:
- driving an active element of a vibrational air transfer device to induce a vibrational motion at a frequency, the vibrational motion driving fluid through the vibrational air transfer device, the vibrational air transfer device extending in space and defining a plane, the vibrational air transfer device being thermally and mechanically coupled to a heat spreader, the mechanical coupling allowing the vibrational air transfer device to tilt with respect to the plane about at least one axis and damping translation with respect to the heat spreader.
Dependencies are inferred from the claim text.