Pellicle film attachment apparatus and pellicle film attachment method
AssigneeLintec Corporation
InventorTakuya HAYASAKA
Life of this patent
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Abstract
A pellicle film attachment apparatus includes: a liquid support unit configured to support a liquid to be adhered to an adherend surface of a frame member; a pellicle film support unit configured to support a pellicle film to be attached to the adherend surface; and a frame conveyance unit configured to convey the frame member and to attach the pellicle film to the frame member, in which the frame conveyance unit is configured to convey the frame member to a liquid adhesion location where the liquid is adhered to the frame member and a pellicle film attachment location where the pellicle film is attached to the frame member.
Claims4
A pellicle film attachment apparatus, comprising:
- a liquid support unit configured to support a liquid to be adhered to an adherend surface of a frame member;
- a pellicle film support unit configured to support a pellicle film to be attached to the adherend surface;
- and
- a frame conveyance unit configured to convey the frame member and to attach the pellicle film to the frame member,
- wherein the frame conveyance unit is configured to convey the frame member to a liquid adhesion location where the liquid is adhered to the frame member and a pellicle film attachment location where the pellicle film is attached to the frame member.
A pellicle film attachment method comprising:
- supporting a liquid to be adhered to an adherend surface of a frame member;
- supporting a pellicle film to be attached to the adherend surface;
- and
- conveying the frame member and attaching the pellicle film to the frame member using a frame conveyance unit,
- wherein, in the conveying of the frame member, the frame member is conveyed, using the frame conveyance unit, to a liquid adhesion location where the liquid is adhered to the frame member and a pellicle film attachment location where the pellicle film is attached to the frame member.
Dependencies are inferred from the claim text.