Collet apparatus

A collet apparatus comprising:

• a body unit;
• and
• an adsorption unit connected to a lower part of the body unit, the adsorption unit being configured to adsorb a semiconductor chip, wherein
• the adsorption unit includes a first region and a second region,
• the second region surrounds the first region,
• the first region includes a plurality of first suction holes,
• the second region includes a plurality of second suction holes, and
• a size of each of the plurality of second suction holes is smaller than a size of each of the plurality of first suction holes.

A collet apparatus comprising:

• a body unit;
• an adsorption unit connected to a lower part of the body unit, the adsorption unit being configured to adsorb a semiconductor chip;
• and
• a suction line configured to adsorb the semiconductor chip to the adsorption unit, wherein
• the adsorption unit includes a first region, a second region, and a third region,
• the second region surrounds the first region,
• the third region surrounds the second region,
• the first region includes a plurality of first suction holes,
• the second region includes a plurality of second suction holes,
• the third region includes a plurality of third suction holes,
• a size of each of the plurality of second suction holes is smaller than a size of each of the plurality of first suction holes,
• a size of each of the plurality of third suction holes is smaller than the size of each of the plurality of second suction holes,
• an area of the plurality of first suction holes is at least 60% of a sum of areas of the plurality of first suction holes, the plurality of second suction holes, and the plurality of third suction holes,
• an area of the first region is less than 30% of a total area of the adsorption unit, and
• the suction line is connected to the plurality of first suction holes, the plurality of second suction holes, and the plurality of third suction holes.