Apparatus and method for controlling spread of plurality of droplets of photo-curing composition
AssigneeCanon Kabushiki Kaisha
InventorsTOMOHIRO HARAYAMA, KIYOHITO YAMAMOTO
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Abstract
An information processing method for generating control information for controlling spread of a plurality of droplets of a photo-curing composition arranged between a substrate and a mold, includes generating, as a part of the control information, control data that controls an irradiation condition of light to be irradiated to each of the plurality of droplets such that a shape change of each of the plurality of droplets before droplets adjacent to each other among the plurality of droplets are connected to each other satisfies a target condition.
Claims6
A film forming apparatus that forms a cured film by bringing a plurality of droplets of a photo-curing composition arranged on a substrate into contact with a mold and curing a liquid film formed by connection of the plurality of droplets, comprising:
- an optical modulation device configured to control a spatial illuminance distribution of light to be irradiated to the plurality of droplets;
- and
- a controller configured to control the optical modulation device,
- wherein the controller controls the optical modulation device such that a shape change of each of the plurality of droplets before droplets adjacent to each other among the plurality of droplets are connected to each other satisfies a target condition.
Dependencies are inferred from the claim text.