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US 2026/0101716 A1Published application
Substrate gripper
AssigneeApplied Materials, Inc.
InventorsJames Christopher Hansen, Paul Benjamin Reuter
Life of this patent
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Abstract
A substate gripper includes a first plate, a second plate, and a plurality of arms coupled with the first plate and the second plate. Each of the plurality of arms includes at least one flexure member configured to flex responsive to movement of the second plate with respect to the first plate. Flexure of the flexure members of the plurality of arms causes respective ends of the plurality of arms to perform a gripping action to grip a substrate.
Claims20
A substrate gripper, comprising:
- a first plate;
- a second plate;
- and
- a plurality of arms coupled with the first plate and the second plate, wherein each of the plurality of arms comprises at least one flexure member configured to flex responsive to movement of the second plate with respect to the first plate;
- wherein flexure of the flexure members of the plurality of arms causes respective ends of the plurality of arms to perform a gripping action to grip a substrate.
2 more elements
A factory interface, comprising:
- a substrate-handling robot;
- and
- a substrate gripper, wherein the substrate gripper comprises:
- a first plate;
- a second plate;
- and
- a plurality of arms coupled with the first plate and the second plate, wherein each of the plurality of arms comprises at least one flexure member configured to flex responsive to movement of the second plate with respect to the first plate;
- wherein flexure of the flexure members of the plurality of arms causes respective ends of the plurality of arms to perform a gripping action to grip a substrate.
5 more elements
A method, comprising:
- providing, by a substrate-handling robot, a substrate support supporting a substrate to a substrate gripper;
- actuating a plurality of arms of the substrate gripper, wherein each of the plurality of arms comprises at least one flexure member configured to flex responsive to actuation of the plurality of arms, and wherein flexure of the flexure members of the plurality of arms causes respective ends of the plurality of arms to perform a gripping action to grip the substrate;
- and
- separating the substrate from the substrate support by the substrate gripper.
1 more element
Dependencies are inferred from the claim text.