Locking/unlocking module for wafer carrier load port

A wafer carrier load port, comprising:

• a frame having a communication opening and a port door, the port door being configured to cover the communication opening;
• a carrier platform fixed to a first side of the frame and configured to carry a wafer carrier, the wafer carrier comprising a main body and a door panel facing the communication opening, and the door panel having a hole;
• and
• a locking and unlocking module disposed on a second side of the frame opposite the carrier platform, the locking and unlocking module comprising:
• a transmission assembly disposed on a first side of the port door opposite the carrier platform, the transmission assembly comprising a linear guide and a linear moving member slidable along the linear guide, the linear moving member being provided with a plurality of toothed structures arranged in a straight line, and the linear guide being disposed on the port door;
• an actuator disposed on the first side of the port door opposite the carrier platform and coupled to the linear moving member, the actuator being configured to reciprocate the linear moving member in a direction parallel to the straight line;
• a gear disposed on the first side of the port door opposite the carrier platform and meshing with the toothed structures of the linear moving member;
• and
• a locking latch including a first end portion and a second end portion opposite the first end portion, the port door being located between the first end portion and the second end portion, the locking latch being disposed coaxially with and driven together with the gear, the locking latch being rotatable to at least a first position and a second position, wherein, when the locking latch is in the first position, the locking latch mates with the hole of the door panel, and, when the locking latch is in the second position, the door panel is separable from the main body.