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AssigneeTeramount Ltd.
InventorsAbraham Israel, Hesham Taha, Elad Schleifer, Lior Rechtman, Svetlana Golod Tentser
Estimating the term…
Systems, methods, and devices for measuring tilt and/or misalignment of one substrate with respect to a second substrate are disclosed, for example, using thin-film interference. For example, an apparatus may include a substrate having a plurality of pedestals, each having a predefined height. A portion of the plurality of pedestals may be configured to engage and distance the substrate from a second underlying substrate. The plurality of pedestals may be further configured to indicate an alignment of the substrate with the underlying second substrate based on a spectrum of light emitted from the plurality of pedestals.
An apparatus comprising:
An apparatus comprising:
An apparatus comprising:
Dependencies are inferred from the claim text.