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OwnerRobin LINTEN, Norman BAER +2inventors
InventorsRobin LINTEN, Norman BAER, Maike LORENZ, Martin VON HODENBERG
Estimating the term…
An optical system, such as in a microlithographic projection exposure apparatus, comprises at least one mirror having an optical active surface and a mirror substrate made of a mirror substrate material. At least one cooling channel is provided in the mirror substrate through which a cooling fluid with a variably settable cooling-fluid temperature can flow. In a method of operating an optical system, the cooling-fluid temperature is set on the basis of an existing deviation between an actual value for the average zero-crossing temperature of the coefficient of thermal expansion of the mirror substrate material and a predefined setpoint for this average zero-crossing temperature. The cooling-fluid temperature is controlled during operation of the optical system. The control is effected on the basis of a feedforward model.
A method of operating an optical system, the optical system comprising a mirror, the mirror comprising an optical active surface and a mirror substrate, the mirror substrate comprising a mirror substrate material, the mirror substrate comprising a cooling channel configured to have a cooling fluid flow therethrough, the method comprising:
An optical system, comprising:
Dependencies are inferred from the claim text.