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US 2026/0092877 A1Published application
Inspection apparatus and method for operating the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPing-Hung CHEN, Hung-Tai TSAO, Jun-Da LIN, Ji-Jie CHOU
Life of this patent
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Abstract
A method for operating an inspection apparatus is provided. The method includes placing a reticle over a stage; moving the stage by moving a vehicle supporting the stage on a rail; inspecting the reticle over the stage; and using a cleaning mechanism, generating a suction force nearby the rail.
Claims20
A method for operating an inspection apparatus, comprising:
- placing a reticle over a stage;
- moving the stage by moving a vehicle supporting the stage on a rail;
- inspecting the reticle over the stage;
- and
- using a cleaning mechanism, generating a suction force nearby the rail.
2 more elements
A method for operating an inspection apparatus, comprising:
- placing a reticle over a stage;
- moving the stage by moving a vehicle supporting the stage on a rail;
- inspecting the reticle over the stage;
- and
- using a cleaning mechanism, providing a purging gas flow nearby the rail.
2 more elements
An inspection apparatus, comprising:
- a stage;
- a rail;
- a vehicle configured to support the stage and move on the rail;
- and
- a cleaning mechanism, comprising:
- a gas distribution structure at a side the vehicle;
- and
- a gas suction source fluidly connected with the gas distribution structure, wherein the gas suction source is configured to generate a suction force nearby the rail through a first hole of the gas distribution structure.
5 more elements
Dependencies are inferred from the claim text.