Electrostatic chuck

Abstract

An electrostatic chuck 10 includes: a dielectric substrate 100 that includes a first part 101 including a surface 110 as a placement surface, and a second part 102 thinner than the first part 101 projecting from an outer peripheral end of the first part 101 further toward an outer peripheral side; a first internal electrode 140 provided inside the first part 101; a second internal electrode 150 provided inside the second part 102; a first power supply member 401 that is provided on a surface 120 of the dielectric substrate 100 and electrically connected to the first internal electrode 140; and a second power supply member 402 that is provided on the surface 120 of the dielectric substrate 100 and electrically connected to the second internal electrode 150. Both of the first power supply member 401 and the second power supply member 402 are provided in the first part 101 of the dielectric substrate 100.

Dependencies are inferred from the claim text.