Dynamic random access memory (dram) with backend transistors
AssigneeIntel Corporation
InventorAbhishek A. Sharma
Life of this patent
Estimating the term…
Loading patent…
AssigneeIntel Corporation
InventorAbhishek A. Sharma
Estimating the term…
A dynamic random-access memory (DRAM) device has a layer of backend transistors that are formed over the DRAM array. For example, the backend transistors may include channel regions or other transistor structures that are in direct contact with an etch stop layer formed over the DRAM array. The backend transistors may increase the amount of surface area that can be utilized for memory cells by moving transistors for implementing power gating, SRAM tags, or other features to a backend layer that is over the storage capacitors. Low temperature processes may be used to fabricate the backend transistors while minimizing damage to frontend structures.
A device comprising:
A device comprising:
A package comprising:
Dependencies are inferred from the claim text.