Single Crystal Diamond Dies Packaged with Ultrathin Semiconductor Wafer

Abstract

A reconstituted wafer product may include dies containing diamond sandwiched between first and second wafers in a manner that provides a thermally conductive connection between the first wafer and second wafer through the dies containing diamond. Alternatively, dies containing diamond may be attached to a tape in frame or temporary carrier substrate or tape on reel carrier substrate. Alternatively, dies containing diamond may be attached to a wafer in a manner that provides a thermally conductive connection between the wafer and the dies containing diamond. A first smoothening layer may be formed on a first side of the dies between the wafer and the dies. A second smoothening layer may be formed on a second side of the dies with the dies containing sandwiched between the first and second smoothening layers.

Dependencies are inferred from the claim text.