Scheduling substrate processing over multiple processing chambers

A device comprising:

• one or more processors;
• and
• a memory storing instructions that, upon being executed by the one or more processors, configure the device to:
• receive one or more requests to fabricate substrates, the one or more requests corresponding to a workload over a first period of time;
• and
• schedule the workload across a plurality of processing chambers over the first period of time to maximize an aggregate time that the plurality of processing chambers are in a sleep mode by distributing, over the first period of time, the workload across the plurality of processing chambers such that the sleep mode is maximized for a first subset of the plurality of processing chambers and a production mode is maximized for a second subset of the plurality of processing chambers, wherein the sleep mode corresponds to a lower energy consumption than the production mode.

A system comprising:

• a plurality of processing chambers;
• and
• one or more devices communicatively coupled to the plurality of processing chambers, wherein the one or more devices are to:
• receive one or more requests to fabricate substrates, the one or more requests corresponding to a workload over a first period of time;
• and
• schedule the workload across the plurality of processing chambers over the first period of time to maximize an aggregate time that the plurality of processing chambers are in a sleep mode by distributing, over the first period of time, the workload across the plurality of processing chambers such that the sleep mode is maximized for a first subset of the plurality of processing chambers and a production mode is maximized for a second subset of the plurality of processing chambers, wherein the sleep mode corresponds to a lower energy consumption than the production mode.