Imprint apparatus, imprint method, storage medium, and method of manufacturing article

An imprint method for sequentially imprinting a plurality of imprint regions of a substrate by using an imprint apparatus comprising a plurality of gas supply units configured to supply a gas to a space between a mold and a substrate and at least one processor or circuit configured to function as a control unit configured to control the gas supply units and an imprint operation, the imprint method comprising:

• acquiring position information of the imprint regions on the substrate, imprint order information, and a predetermined gas supply amount information of each of the imprint regions;
• and
• simultaneously supplying a predetermined amount of the gas based on the gas supply amount information from both of a first direction side and a second direction side of the plurality of gas supply units, at the time of an imprint operation of the imprint region just before a movement direction between the imprint regions of the substrate is to be changed from a first direction to a second direction,
• wherein at the time of an imprint operation of the imprint region just before a movement direction between the imprint regions of the substrate is not to be changed from the first direction to the second direction, the control unit controls the gas supply amount on the second direction side of the plurality of gas supply units so as to be smaller than the gas supply amount on the first direction side.

A method of manufacturing an article by using an imprint apparatus, wherein the imprint apparatus comprises:

• a plurality of gas supply units configured to supply a gas to a space between a mold and a substrate;
• and
• at least one processor or circuit configured to function as:
• a control unit configured to control the gas supply unit and an imprint operation,
• wherein the method of manufacturing an article comprises:
• sequentially imprinting in a plurality of imprint regions of the substrate;
• acquiring position information of the imprint regions on the substrate, imprint order information, and predetermined gas supply amount information for each imprint region;
• simultaneously supplying a predetermined amount of the gas based on the gas supply amount information from both of a first direction side and a second direction side of the plurality of gas supply units, at the time of an imprint operation of the imprint region just before a movement direction between the imprint regions of the substrate is to be changed from a first direction to a second direction;
• and
• developing the substrate on which the imprinting has been performed,
• wherein at the time of an imprint operation of the imprint region just before a movement direction between the imprint regions of the substrate is not to be changed from the first direction to the second direction, the control unit controls the gas supply amount on the second direction side of the plurality of gas supply units so as to be smaller than the gas supply amount on the first direction side.