Systems and methods for generating drop patterns

A system for imprinting or planarizing, comprising:

• a substrate chuck configured to hold a substrate;
• a dispenser configured to supply formable material onto the substrate;
• and
• a controller configured to control the dispenser in accordance with a drop pattern of the formable material that indicates drop locations where respective drops of the formable material are to be supplied onto the substrate,
• wherein the controller is further configured to:
• receive a predetermined fluid drop volume of a drop;
• receive information regarding an array of cells defining a desired fill set associated with the predetermined fluid drop volume, wherein the information includes a predetermined fluid volume of each cell of the array of cells and a predetermined location of each cell of the array of cells;
• determine a distance from a center of mass of the array of cells to the predetermined location of each cell of a plurality of cells of the array of cells;
• identify, among cells of the plurality of cells whose distance from the center of mass is within a predetermined threshold distance, a cell having the largest predetermined fluid volume;
• and
• assign the predetermined location of the identified cell as the drop position of the drop in the drop pattern.

A method of manufacturing an article, comprising:

• a) receiving a predetermined fluid drop volume of the drop;
• b) receiving information regarding an array of cells defining a desired fill set associated with the predetermined fluid drop volume, wherein the information includes a predetermined fluid volume of each cell of the array of cells and a predetermined location of each cell of the array of cells;
• c) determining a distance from a center of mass of the array of cells to the predetermined location of each cell of a plurality of cells of the array of cells;
• d) identifying, among cells of the plurality of cells whose distance from the center of mass is within a predetermined threshold distance, a cell having the largest predetermined fluid volume;
• e) assigning the predetermined location of the identified cell as the drop position of the drop in the drop pattern;
• f) repeating a) to e) until completing the drop pattern;
• g) dispensing drops of formable material onto a substrate according to the completed drop pattern;
• h) contacting the dispensed drops with a template or superstrate to form a film;
• i) exposing the film under the template or the superstrate to actinic radiation;
• j) processing the substrate;
• and
• k) forming the article from the processed substrate.