Optical proximity correction method and mask manufacturing method including the opc method

An optical proximity correction (OPC) method comprising:

• obtaining an OPC target design layout;
• dividing one or more edges of the OPC target design layout into a plurality of segments;
• setting a direction of progression of the plurality of segments;
• measuring angles of the plurality of segments with respect to the direction of progression;
• setting a mode for adding vertices based on the angles of the plurality of segments;
• adding the vertices based on the mode;
• adding at least one fake segment extending to an added vertex, among the vertices;
• and
• performing a Manhattan OPC based on the least one fake segment,
• wherein the at least one fake segment is added in a normal direction to one of both ends, a start point, and an end point of a segment, among the plurality of segments, and
• wherein the measuring of the angles of the segments with respect to the direction of progression comprises determining whether an angle of a corner bending is 2n times 45°, where n is an integer, based on the direction of progression of the segments.

A mask manufacturing method comprising:

• obtaining an OPC target design layout;
• dividing one or more edges of the OPC target design layout into a plurality of segments;
• setting a direction of progression of the plurality of segments;
• measuring angles of the plurality of segments with respect to the direction of progression;
• setting a mode for adding vertices based on the angles of the plurality of segments;
• adding the vertices based on the mode;
• adding at least one fake segment extending to an added vertex, among the vertices;
• performing a Manhattan OPC based on the at least one fake segment;
• transmitting data regarding a final optical proximity corrected Manhattan design layout as mask tape-out (MTO) design data;
• preparing mask data based on the MTO design data;
• and
• performing exposure on a mask substrate, based on the mask data,
• wherein the at least one fake segment is added in a normal direction of one of both ends, a start point, and an end point of a segment, among the plurality of segments,
• wherein the measuring the angles of the plurality of segments with respect to the direction of progression comprises determining whether an angle of a corner bending is 2n times 45°, where n is an integer, based on the direction of progression of the plurality of segments,
• wherein the mode for adding the vertices comprises one of:
• a start mode for adding a vertex to a start point of a segment, based on the direction of progression of the segments;
• an end mode for adding a vertex to an end point of the segment, based on the direction of progression of the segments;
• and
• a dual mode for adding vertices to the start point and the end point of the segment,
• wherein based on the start point and the end point of each of the plurality of segments being first vertices and dissection points added in the adding of the vertices being second vertices, the at least one fake segment extends to a second vertex corresponding to a first vertex, and
• wherein the first vertex is or corresponds to one of the first vertices, and the second vertex is or corresponds to one of the second vertices.