Shaped Solid Silicon Carbide Vapor Source Material Structure for use in a Sublimation System for Growing Crystalline Silicon Carbide
AssigneeWolfspeed, Inc.
InventorsValeri Fedorovich Tsvetkov, William Henry Brixius, Steven Herbert Griffiths, Brian Bennett Haidet, Elif Balkas, Caleb Andrew Kent, Yuri I. Khlebnikov
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