Flexible element for a substrate processing chamber

A processing chamber comprising:

• a chamber body;
• a seal plate disposed in the chamber body, and including a first interface surface;
• a second interface surface disposed in the chamber body;
• a flexible element including:
• a first portion engaged with the first interface surface;
• a second portion facing the second interface surface;
• and
• an intermediate portion spanning between the first portion and the second portion;
• wherein the intermediate portion is impermeable, and is configured to flex to allow adjustment of a position of the first portion relative to the second portion.

A processing chamber comprising:

• a chamber body;
• a seal plate disposed in the chamber body, and including a first interface surface;
• a second interface surface disposed in the chamber body;
• a flexible element including:
• a first portion engaged with the second interface surface;
• a second portion facing the first interface surface;
• and
• an intermediate portion spanning between the first portion and the second portion;
• wherein the intermediate portion is impermeable, and is configured to flex to allow adjustment of a position of the first portion relative to the second portion.