Liquid supply unit and substrate processing apparatus including the same

A liquid supply unit comprising:

• a storage assembly in which a liquid is stored;
• and
• a liquid supply pipe for supplying the liquid in the storage assembly to the outside,
• wherein the storage assembly includes:
• a container having an interior space;
• a pack unit that is placed in the interior space and includes an inner pack in which a liquid is stored;
• a liquid delivery pipe for supplying the liquid stored in the inner pack to the liquid supply pipe;
• and
• a pressurizing unit positioned outside the pack unit in the interior space and physically pressurizes the pack unit.

An apparatus for processing a substrate, the apparatus comprising:

• a liquid treating chamber for processing a substrate;
• and
• a liquid supply unit for supplying a liquid to the substrate disposed in the liquid treating chamber,
• wherein the liquid supply unit includes:
• a storage assembly in which a liquid is stored;
• and
• a liquid supply pipe for supplying the liquid in the storage assembly to the liquid treating chamber, and
• the storage assembly includes:
• a container having an interior space;
• a pack unit including an inner pack for storing a liquid and an outer pack having an accommodation space for accommodating the inner pack;
• a gas supply unit for supplying gas into the accommodation space to an outer space of the inner pack;
• a liquid delivery pipe for supplying the liquid stored in the inner pack to the liquid supply pipe;
• and
• a pressurizing unit positioned outside the outer pack in the accommodation space and physically pressurizing the outer pack and the inner pack, and
• the pressurizing unit includes:
• a pressurizing member including a first pressurizing member and a second pressurizing member that are positioned to face each other with the pack unit interposed therebetween and have a roller shape;
• a first driver for moving the pressurizing member between a standby position spaced apart from the pack unit and a pressurizing position for pressurizing the pack unit;
• and
• a second driver for rotating the first pressurizing member and the second pressurizing member with respect to a central axis thereof.