Load port mounting position adjustment mechanism

A load port mounting position adjustment mechanism capable of adjusting a mounting position of a load port on a wall surface of a transfer chamber that defines a substantially closed substrate transfer space in the transfer chamber, the load port mounting position adjustment mechanism comprising:

• an X-axis adjustment part configured to adjust a position of the load port in a width direction of the wall surface;
• a Y-axis adjustment part configured to adjust the position of the load port in a thickness direction of the wall surface;
• and
• a Z-axis adjustment part configured to adjust the position of the load port in a height direction of the wall surface,
• wherein a three-axis adjustment mechanism that integrates the X-axis adjustment part, the Y-axis adjustment part and the Z-axis adjustment part is mounted to the wall surface by using a mounting hole formed in at least one of an upper section or a middle section of the wall surface.