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US 2026/0011591 A1Published application
Device for substrate containers and methods of using the storage device
AssigneeEntegris, Inc.
InventorsColton J. Harr, Adam Amble
Life of this patent
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Abstract
Described are methods and apparatuses that are useful for removing contaminants from substrate containers that are used to hold, store, or transport semiconductor substrates.
Claims19
A method of decontaminating a substrate container, the method comprising:
- in a decontamination apparatus that comprises:
- an enclosure that defines an apparatus interior,
- an access port that connects the apparatus interior to an exterior atmosphere, and
- decontaminating atmosphere in the apparatus interior,
- moving a substrate container from the apparatus exterior, through the access port, and into the decontaminating atmosphere, the substrate container comprising a body that contains adsorbed contaminants, the decontaminating atmosphere causing the absorbed contaminants to desorb from the body at a rate that is faster than a rate at which the adsorbed contaminants desorb from the body when held in the exterior atmosphere.
2 more elements
Dependencies are inferred from the claim text.