Information processing apparatus, information processing method, and substrate processing apparatus
AssigneeTokyo Electron Limited
InventorsNobutoshi TERASAWA, Ryota AOI
Life of this patent
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Abstract
An information processing apparatus including: an acquisition unit that acquires a process log for each execution of the same process including a plurality of process steps in one or more substrate processing apparatuses that execute the process according to a recipe; an analysis unit that compares, based on the process logs, step times taken for the same process step and analyzes a process step having time variation as time-variable step; and a display control unit that displays information related to the time-variable step.
Claims10
An information processing apparatus comprising:
- acquisition circuitry configured to acquire a process log for each execution of a process including a plurality of process steps in one or more substrate processing apparatuses that execute the process according to a recipe;
- analysis circuitry configured to compare, based on the process logs, step times taken for the same process step and analyze a process step having time variation as a time-variable step;
- and
- display control circuitry configured to display information related to the time-variable step.
An information processing method performed by an information processing apparatus, the information processing method comprising:
- acquiring a process log for each execution of a process including a plurality of process steps in one or more substrate processing apparatuses that execute the process according to a recipe;
- comparing, based on the process logs, step times taken for the same process step and analyzing a process step having time variation as a time-variable step;
- and
- displaying information related to the time-variable step.
A substrate processing apparatus comprising:
- acquisition circuitry configured to acquire a process long for each execution of a process including a plurality of process steps in one or more substrate processing apparatuses that execute the process according to a recipe;
- analysis circuitry configured to compare, based on the process logs, step times taken for the same process step and analyze a process step having time variation as time-variable step;
- and
- display control circuitry configured to display information related to the time-variable step.
Dependencies are inferred from the claim text.