Resist composition and method of forming pattern using the same

A resist composition comprising:

• an organometallic compound represented by Formula 1;
• and
• a polymer including a first repeating unit represented by Formula 2 and a second repeating unit represented by Formula 3,
• wherein, in Formulae 1 to 3,
• M11 is indium (In), tin (Sn), antimony (Sb), tellurium (Te), thallium (Tl), lead (Pb), bismuth (Bi), or polonium (Po),
• Rx is *-(L1)a1-(R1)b1,
• Ry is *—Y1—X1,
• n is an integer from 1 to 6,
• m is an integer from 0 to 6,
• m−n is greater than or equal to 0,
• a plurality of Rx are identical or different from each other,
• a plurality of Ry are identical or different from each other,
• L1 is a single bond or a linear, branched, or cyclic C1-C30 divalent hydrocarbon group,
• a1 is an integer from 1 to 4,
• R1 is a substituted or unsubstituted C1-C30 alkyl group, a substituted or unsubstituted C3-C30 cycloalkyl group, a substituted or unsubstituted C3-C30 heterocycloalkyl group, a substituted or unsubstituted C2-C30 alkenyl group, a substituted or unsubstituted C3-C30 cycloalkenyl group, a substituted or unsubstituted C3-C30 heterocycloalkenyl group, a substituted or unsubstituted C2-C30 alkynyl group, a substituted or unsubstituted C6-C30 aryl group, a substituted or unsubstituted C7-C30 arylalkyl group, a substituted or unsubstituted C1-C30 heteroaryl group, or a substituted or unsubstituted C2-C30 heteroarylalkyl group, wherein two adjacent groups among a plurality of R1 are optionally bound together to form a condensed ring,
• b1 is an integer from 1 to 4,
• Y1 is O, O(C═O), S, S(C═O), NX14, or N(C═O),
• X1 and X14 are each independently hydrogen, deuterium, or a linear, branched, or cyclic C1-C30 monovalent hydrocarbon group that optionally includes a heteroatom,
• L21 to L23 are each independently a single bond, O, S, C(═O), C(═O)O, OC(═O), C(═O)NR22, NR22C(═O), S(═O), S(═O)2, S(═O)2O, OS(═O)2, or a linear, branched, or cyclic C1-C30 divalent hydrocarbon group that optionally includes a heteroatom,
• L31 to L33 are each independently a single bond, O, S, C(═O), C(═O)O, OC(═O), C(═O)NR22, NR22C(═O), S(═O), S(═O)2, S(═O)2O, OS(═O)2, or a linear, branched, or cyclic C1-C30 divalent hydrocarbon group that optionally includes a heteroatom,
• L24 is C(═O)O, OC(═O), C(═O)S, SC(═O), OC(═O)O, SC(═O)O, OC(═O)S, SC(═O)S, C(═O)NR22, NR22C(═O), OC(═O)NR22, or NR22C(═O)O,
• L34 is C(═O)O, OC(═O), C(═O)S, SC(═O), OC(═O)O, SC(═O)O, OC(═O)S, SC(═O)S, C(═O)NR32, NR32C(═O), OC(═O)NR32, or NR32C(═O)O,
• a21 to a24 and a31 to a34 are each independently an integer from 1 to 4,
• R21, R22, R31, and R32 are each independently hydrogen, deuterium, or a linear, branched, or cyclic C1-C30 monovalent hydrocarbon group that optionally includes a heteroatom,
• X21 is a substituted or unsubstituted C2-C30 alkenyl group, a substituted or unsubstituted C3-C30 cycloalkenyl group, a substituted or unsubstituted C3-C30 heterocycloalkenyl group, a substituted or unsubstituted C2-C30 alkynyl group, a substituted or unsubstituted C6-C30 aryl group, a substituted or unsubstituted C7-C30 arylalkyl group, a substituted or unsubstituted C1-C30 heteroaryl group, or a substituted or unsubstituted C2-C30 heteroarylalkyl group,
• X31 is an electron-withdrawing group,
• p21 and p31 are each independently an integer from 1 to 5, and
• * indicates a binding site to a neighboring atom.