Molding apparatus, molding method, and template
AssigneeCanon Kabushiki Kaisha
InventorsMasatoshi Kobayashi, Keiko ` Chiba
Life of this patent
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Abstract
A molding apparatus including a template apparatus is configured to bring the template into contact with a curable composition arranged on a substrate and to cure the curable composition. The template includes a planarization coating layer of which a site front least squares range (SFQR) is 20 nm or less in a contact surface which is a surface of the template in contact with the curable composition.
Claims6
A molding apparatus comprising a template, the molding apparatus configured to bring the template into contact with a curable composition arranged on a substrate and to cure the curable composition,
- wherein the template includes a planarization coating layer of which a site front least squares range (SFQR) is 20 nm or less in a contact surface which is a surface of the template in contact with the curable composition.
A template used in planarization to bring the template into contact with curable composition arranged on a substrate and to cure the curable composition,
- wherein the template includes a planarization coating layer of which a site front least squares range (SFQR) is 20 nm or less in a contact surface which is a surface of the template in contact with the curable composition.
Dependencies are inferred from the claim text.