Reticle container for non-equilateral rectangle reticle

A non-equilateral rectangular reticle container, for receiving a non-equilateral rectangular reticle, comprising:

• an outer pod comprising a shell and a door, both capable of opening and closing relative to each other, wherein the shell and the door each have a length and a width and together define a receiving space;
• an inner pod comprising a cover and a base, both capable of opening and closing relative to each other, wherein the cover and the base each have a length and a width, with the inner pod located inside the receiving space of the outer pod and configured to receive the non-equilateral rectangular reticle;
• and
• a gas diffusion device disposed inside the outer pod and comprising at least a flow path and at least a gas diffusion component in communication with each other and disposed between the shell and the door, allowing the flow path to deliver gas to the gas diffusion component to blow the gas toward the cover of the inner pod,
• wherein the length of the outer pod is 1.25 to 2.5 times a length of the non-equilateral rectangular reticle, and the width of the outer pod is 1.25 to 2.5 times a width of the non-equilateral rectangular reticle,
• wherein the length of the inner pod is 1.05 to 2.0 times a length of the non-equilateral rectangular reticle, and the width of the inner pod is 1.05 to 2.0 times a width of the non-equilateral rectangular reticle.

A non-equilateral rectangular reticle container, for receiving a non-equilateral rectangular reticle, comprising:

• an outer pod comprising a shell and a door, both capable of opening and closing relative to each other, wherein the shell and the door each have a length and a width and together define a receiving space;
• an inner pod comprising a cover and a base, both capable of opening and closing relative to each other, wherein the cover and the base each have a length and a width, with the inner pod located inside the receiving space of the outer pod and configured to receive the non-equilateral rectangular reticle;
• and
• at least two observation windows disposed on the door and the base respectively and corresponding in position to each other,
• wherein the base has a central area where the observation window is located, the central area being defined by a length 0.9 times the length of the non-equilateral rectangular reticle and by a width 0.9 times the width of the non-equilateral rectangular reticle,
• wherein the observation window of the door aligns with at least a portion of the central area of the base, allowing the non-equilateral rectangular reticle and a pellicle to be directly observed through the observation window of the door and the observation window of the base,
• wherein the length of the outer pod is 1.5 to 2.5 times a length of the non-equilateral rectangular reticle, and the width of the outer pod is 1.5 to 2.5 times a width of the non-equilateral rectangular reticle, and
• wherein the length of the inner pod is 1.05 to 2.0 times the length of the non-equilateral rectangular reticle, and the width of the inner pod is 1.05 to 2.0 times the width of the non-equilateral rectangular reticle.

A non-equilateral rectangular reticle container, for receiving a non-equilateral rectangular reticle, comprising:

• a shell;
• and
• a door, wherein the door and the shell are capable of opening and closing relative to each other and define a receiving space, and the door has a length and a width equal to those of the shell respectively, with the receiving space receiving the non-equilateral rectangular reticle,
• wherein the length and the width are 1.25 to 2.5 times a length of the non-equilateral rectangular reticle.